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Paper Publications

15. Cooperative roles of chemical reactions and mechanical friction in chemical mechanical polishing of gallium nitride assisted by OH radicals: Tight-binding quantum chemical molecular dynamics simulations, Physical Chemistry Chemical Physics, 23 (2021) 4075-4084.

Journal:Tunnelling and Underground Space Technology

Note:Hu, Xiong-Yu; He, Chuan; Lai, Xiao-Hui; Walton, Gabriel; Xu, Guo-Wen.

Volume:2020

Issue:97

Translation or Not:no

hechuan

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