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Surface Structure Dependence of Mechanochemical Etching: Scanning Probe-Based Nanolithography Study on Si(100), Si(110), and Si(111)

Impact Factor:10.383

DOI number:10.1021/acsami.9b00133

Journal:ACS Applied Materials & Interfaces

Co-author:Chen Xiao, Xiaojun Xin, Xin He, Hongbo Wang, Lei Chen, Seong H. Kim,* and Linmao Qian*

Volume:11

Issue:23

Page Number:20583–20588

Translation or Not:no

Date of Publication:2019-04-29

Included Journals:SCI

Links to published journals:https://pubs.acs.org/doi/full/10.1021/acsami.9b00133

Hongbo Wang

Lecturer (higher education)

Supervisor of Master's Candidates

Gender:Male Education Level:PhD graduate Alma Mater:西南交通大学 Main positions:智能制造与装备系主任助理 Other Post:智慧城市与交通学院本科教学秘书 Degree:Doctor of engineering Status:在岗 School/Department:城市轨道交通学院(智慧城市与交通学院) Business Address:西南交通大学犀浦校区3号教学楼31608,智慧城市与交通学院