Surface Structure Dependence of Mechanochemical Etching: Scanning Probe-Based Nanolithography Study on Si(100), Si(110), and Si(111)

Impact Factor:10.383

DOI number:10.1021/acsami.9b00133

Journal:ACS Applied Materials & Interfaces

Co-author:Chen Xiao, Xiaojun Xin, Xin He, Hongbo Wang, Lei Chen, Seong H. Kim,* and Linmao Qian*

Volume:11

Issue:23

Page Number:20583–20588

Translation or Not:no

Date of Publication:2019-04-29

Included Journals:SCI

Links to published journals:https://pubs.acs.org/doi/full/10.1021/acsami.9b00133