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Simple and low-cost nanofabrication process of nanoimprint templates for high-quality master gratings: Friction-induced selective etching
Impact Factor:7.392
DOI number:10.1016/j.apsusc.2018.05.147
Journal:Applied Surface Science
First Author:Hongbo Wang, Bingjun Yu, Shulan Jiang, Cheng Chen, Linmao Qian*
Volume:454
Page Number:23-29
Translation or Not:no
Date of Publication:2018-05-19
Included Journals:SCI
Links to published journals:https://www.sciencedirect.com/science/article/pii/S0169433218314612