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Nanoscale directional etching features and mechanism of HF/HNO3 etchant
Impact Factor:2.282
DOI number:10.1088/1361-6439/ac12a3
Journal:Journal of Micromechanics and Microengineering
Correspondence Author:Biyou Peng*, Hongbo Wang* and Haifeng Huang
Volume:31
Issue:9
Page Number:095002
Translation or Not:no
Date of Publication:2021-07-22
Included Journals:SCI
Links to published journals:https://iopscience.iop.org/article/10.1088/1361-6439/ac12a3/meta