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XXXXX原子层刻蚀中的限域作用机理及调控方法
Status:在研
Supported by:National natural science foundation of China
Supported by:National Natural Science Foundation of China
Project level:National natural science foundation of China
Classification of Disciplines:Engineering
Scheduled completion time:2029-12-30
Project Approval Number:52575673
Subsidy Amount:50.0
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