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XXXXX原子层刻蚀中的限域作用机理及调控方法

Status:在研

Supported by:National natural science foundation of China

Supported by:National Natural Science Foundation of China

Project level:National natural science foundation of China

Classification of Disciplines:Engineering

Scheduled completion time:2029-12-30

Project Approval Number:52575673

Subsidy Amount:50.0

Hongbo Wang

Lecturer (higher education)

Supervisor of Master's Candidates

Gender:Male Education Level:PhD graduate Alma Mater:西南交通大学 Main positions:智能制造与装备系主任助理 Other Post:智慧城市与交通学院本科教学秘书 Degree:Doctor of engineering Status:在岗 School/Department:城市轨道交通学院(智慧城市与交通学院) Business Address:西南交通大学犀浦校区3号教学楼31719房间