Associate Professor

Supervisor of Doctorate Candidates

Supervisor of Master's Candidates

Personal Information

  • Education Level: PhD graduate
  • Degree: Doctor of engineering
  • Business Address: Room 2356,Mechanical building
  • Academic Titles: 硕士生导师
  • Alma Mater: Tsinghua University
  • School/Department: 材料科学与工程学院
  • Discipline:Material Processing Engineering
    Material Science
    Material Physics and Chemistry
    Materials Science and Engineering
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    Home > Research > Paper Publications

    面向超薄硅晶圆精密磨削工艺的内部残余应力分析

    Journal:表面技术
    Indexed by:EI
    Volume:54
    Issue:2
    Page Number:161-172
    Translation or Not:no
    Date of Publication:2025-01-31