chenlei
Professor
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- Doctoral Supervisor
- Master Tutor
- Education Level:PhD graduate
- Degree:Doctor of engineering
- Business Address:Room 401, Institute of Tribology Building, Jiuli Campus
- Professional Title:Professor
- Alma Mater:Southwest Jiaotong University
- Supervisor of Doctorate Candidates
- Supervisor of Master's Candidates
- School/Department:School of Mechanical Engineering
Contact Information
- ZipCode：
- OfficePhone：
- PostalAddress：
- Telephone：
- Research Focus
面向IC制造的超精密表面清洗
集成电路（IC）作为信息技术产业的核心，是支撑经济社会发展和保障国家安全的战略性、基础性和先导性产业。随着IC技术节点进入7 nm及以下，晶圆表面对纳米尺度缺陷（含颗粒污染等）的敏感度极其苛刻。而清洗工艺作为晶圆制造产品良率的重点，如何高效、快速清洗和检测晶圆表面纳米缺陷或颗粒成为当前IC制造中的焦点问题之一。