chenlei
Professor
- Doctoral Supervisor
- Master Tutor
- Education Level:PhD graduate
- Degree:Doctor of engineering
- Business Address:Room 401, Institute of Tribology Building, Jiuli Campus
- Professional Title:Professor
- Alma Mater:Southwest Jiaotong University
- Supervisor of Doctorate Candidates
- Supervisor of Master's Candidates
- School/Department:School of Mechanical Engineering
Contact Information
- ZipCode:
- OfficePhone:
- PostalAddress:
- Telephone:
- Research Focus
二维材料微纳结构制造
半导体芯片的特征线宽以摩尔定律持续减小,现硅基 IC 技术已趋近其物理极限,因此寻找硅的替代材料并发展新的柔性纳米电子器件成为当前科学界和半导体产业界面临的当务之急。以石墨烯、二硫化钼等为代表的二维(2D)材料已在柔性屏幕、传感器和微纳电子等方面体现出巨大的应用前景。扫描探针加工技术由于精度高、成本低、加工过程无化学污染、可实时在线原位精准测量等特点受到学术界和产业界越来越多的关注。因此,针对扫描探针技术在纳米结构和纳米器件的制造中具有广阔的应用前景,开展基于扫描探针技术的二维材料纳米加工机理及应用研究。