chenlei
Professor
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- Doctoral Supervisor
- Master Tutor
- Education Level:PhD graduate
- Degree:Doctor of engineering
- Business Address:Room 401, Institute of Tribology Building, Jiuli Campus
- Professional Title:Professor
- Alma Mater:Southwest Jiaotong University
- Supervisor of Doctorate Candidates
- Supervisor of Master's Candidates
- School/Department:School of Mechanical Engineering
Contact Information
- ZipCode：
- OfficePhone：
- PostalAddress：
- Telephone：
- Research Focus
超精密表面加工机理研究
新一代硅通孔三维互连技术为半导体芯片工艺突破5纳米线宽物理极限的限制提供了全新的途径。多针对大规模集成电路中硅通孔三维互连技术对异质材料表面超精密表面的需求，开展多晶硅、单晶硅、非晶硅等异质材料的亚纳米级可控去除机理研究。