肖晨，西南交通大学前沿科学研究院特聘研究员/教授，博士毕业于西南交通大学机械工程学院，荷兰ASML纳米光刻先进研究中心博士后、阿姆斯特丹大学物理系博士后、客座研究员，美国宾夕法尼亚州立大学化学工程系访问学者。截止目前，发表Nano Lett.、ACS Appl. Mater. Interfaces、Carbon、JACS、PRL等SCI论文50余篇，其中一作或通讯作者SCI论文20余篇。曾获得中国机械工程学会上银优秀博士学位论文优秀奖；第八届中国科协优秀科技论文（制造业与材料学科集群）优秀论文奖；

研究方向主要包括：

高端光刻机制造与运维

IC制造工艺

纳米摩擦学

微纳加工

超润滑控制与应用

本课题组每年招收摩擦学 博士生1~2名/硕士生2~3名，欢迎有机械、物理、材料、化学等专业背景以及交叉学科背景的青年才俊加盟团队！联系方式：xiaochen@swjtu.edu.cn

发表论文（粗体为本人；下划线为第一作者；*为通讯作者）：

1.         Chuan Tang, Yilong Jiang, Chao Chen, Chen Xiao*, Junhui Sun, Linmao Qian, and Lei Chen*. Graphene Failure under MPa: Nanowear of Step Edges Initiated by Interfacial Mechanochemical Reactions, Nano Letters 2024, https://doi.org/10.1021/acs.nanolett.3c04335 (IF: 10.8, 封面论文)

2.         C. Xiao, X. Xin, X. He, H. Wang, L. Chen, S. H. Kim*, L. Qian*. Surface structure dependence of mechanochemical etching: scanning probe-based nanolithography study on Si(100), Si(110), and Si(111), ACS Applied Material & Interfaces 2019, 11, 20583−20588. (IF = 9.5, 封面论文)

3.         C Xiao, L. Peng, C. Leriche, F. Hsia, B. Weber, S. Franklin. Capillary adhesion governs the friction behavior of electrochemically corroded polycrystalline diamond, Carbon 2023, 205, 345-352 (IF = 10.9)

4.         C. Xiao, F. Hsia, A. Sutton-Cook, B. Weber, S. Franklin*. Polishing of polycrystalline diamond using synergies between chemical and mechanical inputs: A review of mechanisms and processes. Carbon 2022, 169, 29-48. (IF = 10.9)

5.         C. Xiao, F. Elam, S. Vliet, R. Bliem, S. Lépinay, N. Shahidzadeh, B. Weber, S. Franklin*. Intercrystallite boundaries dominate the electrochemical corrosion behavior of polycrystalline diamond. Carbon 2022, 200, 1-9. (IF = 10.9)

6.         Caiwan Hao§, C. Xiao§ (共同一作), L. Qian, Shuxun Cui*. Detecting van der Waals forces between a single polymer repeating unit and a solid surface in high vacuum. Nano Research 2018, 12, 57-61. (IF = 9.9)

7.         C. Xiao, J. Li, L. Chen, C. Zhang, N. Zhou, Tao Qing, L. Qian*, J. Zhang, J. Luo. Water-based superlubricity in vacuum, Friction 2019, 7(2), 192–198. (IF = 6.8, 封面论文)

8.         C. Xiao, S. Vliet, R. Bliem, B. Weber, S. Franklin*. Electrochemically-stimulated nanoscale mechanochemical wear of silicon. Friction 2023, 11, 2142–2152. (IF = 6.8)

9.         C. Xiao, J. Li, J. Gong, L. Chen, J. Zhang, L. Qian*, J. Luo. Gradual degeneration of liquid superlubricity: Transition from superlubricity to ordinary lubrication, and lubrication failure, Tribology International 2019, 130, 352-358. (IF= 6.2)

10.     C. Xiao, C. Deng, P. Zhang, L. Qian*, S. H. Kim*. Interplay between solution chemistry and mechanical activation in friction-induced material removal of silicon surface in aqueous solution. Tribology International 2020, 148, 106319. (IF = 6.2)

11.     C. Xiao, J. Li, J. Guo, J. Gong, B. Yu, L. Chen*, L Qian. Role of mechanically-driven distorted microstructure in mechanochemical removal of silicon. Applied surface science, 2020, 520, 146337. (IF = 6.7, 封面论文)

12.     C. Xiao, C. Chen, J. Guo, P. Zhang, L. Chen, L. Qian*. Threshold contact pressure for the material removal on monocrystalline silicon by SiO₂ microsphere. Wear 2017, 376-377, 188-193. (IF = 5.0)

13.     C. Xiao, C. Chen; H. Wang; L. Chen, L. Jiang, B. Yu*, L Qian. Effect of counter-surface chemistry on defect-free material removal of monocrystalline silicon. Wear 2019, 426-427, 1233-1239. (IF = 5.0)

14.     C. Xiao, C. Chen, Y. Yao, H. Liu, L. Chen*, L. Qian*, S. H. Kim. Nanoasperity adhesion of silicon surface in humid air: the roles of surface chemistry and oxidized layer structure. Langmuir 2020, 36, 20, 5483–5491. (IF = 3.9)

15.     C. Xiao, J. Li, L. Chen, C. Zhang, N. Zhou, L. Qian*, J. Luo. Speed dependence of liquid superlubricity stability with H₃PO₄ solution. RSC Advances 2017, 7, 49337-49343. (IF = 3.9)

16.     C. Xiao, J. Guo, P. zhang, C. Chen, L. Chen, L. Qian*. Effect of crystal plane orientation on tribochemical removal of monocrystalline silicon. Scientific Reports 2017, 7, 40750. (IF = 4.6)

17.     C. Xiao, P. Shi, W. Yan, L. Chen*, L. Qian, S.H. Kim. Thickness and structure of adsorbed water layer and effects on adhesion and friction at nanoasperity contact, Colloids and Interfaces 2019, 3, 55. (IF = 2.4)

18.     C. Xiao, L. Chen, J. Guo, B. Yu, L. Qian*, Effect of Scratching Load on the Friction-induced Selective Etching of Si₃N₄ Film on Si(100) Surface, The 14th IFToMM World Congress, 2015. (EI, Best research paper)

19.     J Guo, J Gao, C Xiao*, L Chen*, L Qian. Mechanochemical reactions of GaN-Al₂O₃ interface at the nanoasperity contact: Roles of crystallographic polarity and ambient humidity. Friction, 2021, 1-14. (IF = 6.8, 封面论文，第8届中国科协优秀论文)

20.     Y. Jiang, C. Xiao*, L Chen*, J. Li, C. Zhang, N. Zhou, L. Qian, J. Luo. Temporary or permanent liquid superlubricity failure depending on shear-induced evolution of surface topography. Tribology International 2021, 161, 107076. (IF= 6.2)

21.     J Guo, C Xiao*, J Gao, G Li, H Wu, L Chen, L Qian. Interplay between counter-surface chemistry and mechanical activation in mechanochemical removal of N-faced GaN surface in humid ambient. Tribology International 2021, 159, 107004. (IF= 6.2)

22.     J Guo, S Tan, C Xiao*. Atomistic understanding of scratching-induced material attrition of wurtzite single-crystal AlN using nanoscale diamond abrasive. Tribology International 2022, 169, 107483. (IF= 6.2)

23.     J Gao, C Xiao*, C Feng, L Wu, B Yu*, L Qian, S H Kim. Oxidation-induced changes of mechanochemical reactions at GaAs–SiO₂ interface: the competitive roles of water adsorption, mechanical property, and oxidized structure. Applied Surface Science 2021, 548, 149205. (IF = 6.7)

24.     J. Guo, Y. Liu, L. Duan, F. Zhang, C. Xiao*, Towards a deeper understanding of temperature-dependent material removal of single-crystal AlN: An atomistic study, Tribology International 185, 108575 (2023). (IF= 6.2)

25.     Y Liu*, L. Wang, C. Xiao*. The synergistic mechanism between transfer layer and surface passivation of diamond-like carbon film under different gas pressure environments. Applied Surface Science 2022, 587, 152874. (IF = 6.7)

26.     J. Guo, C. Xiao*, J. Gao, J. Liu, L. Chen, L. Qian. Effect of native oxide layer on mechanochemical reaction at the GaN–Al₂O₃ interface. Frontiers in Chemistry 2021, 9, 672240. (IF = 5.5)

27.     Y. Liu*, H. Zhang, Y. Luo, L. Wang, C. Xiao*. Probing the low friction mechanism of hydrogen-free DLC film in oxygen and nitrogen environments by first-principles calculations and molecular dynamics simulation. Surface & Coating Technology 2022, 445, 129219. (IF = 5.4)