Reduction of mid-spatial frequency errors on aspheric and freeform optics by circular-random path polishing

影响因子：3.8

DOI码：10.1364/OE.435945

发表刊物：OPTICS EXPRESS

关键字：TOOL； RIPPLE

摘要：Pseudo-random paths are a useful tool to reduce mid-spatial frequency errors created in the processing of optical surfaces by sub-aperture polishing tools. Several types of patterns have been proposed, including hexagonal, square and circular, but prior literature has largely focused on flat and gently curved surfaces. Here, an extension of the circular-random path to strongly curved aspheric and freeform surfaces is proposed. The main feature of the algorithm is to cover the entire surface to be polished with a uniformly distributed tool path. Aspheric condenser lenses are then polished with a regular raster and circular-random path. Analysis of the optical performance shows that the random path can reduce the amplitude of mid-spatial frequency errors and relative intensity of satellite images. These features are particularly desirable in short wavelength applications, such as mirrors for EUV and X-ray. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

论文类型：SCI

论文编号：20213610871143

卷号：29

期号：19

页面范围：29802-29812

ISSN号：10944087

是否译文：否

发表时间：2021-09-13

收录刊物：SCI、EI

发布期刊链接：https://doi.org/10.1364/OE.435945